ǰ, Դüǰ Ʈ

Detergent for Sapphire Wafer

WD-240 ̾ ۸ Diamond Slurry Polishing(DMP) Colloidal Silica Polishing(CMP) 100~120ɿ ˷̳ Plate (Block) и ˷̳ Plate Wafer Back Side ϴ ̴.

ǰ: WD-240      

* Ư¡

1. (Acid value) īDZ(-COOH) ȭ ݼ Carboxylate ȭ ν ϴ.

2. ܿ Silicon, Quartz, Ceramic ݵü ǰ ݱ ݼ̿° ȭ ųƮ ȭչ Ͽ ǥ鿡 ϱ ũ ϴ.

3. ħ Ͽ α ϴ.

4. ħ(dipping) (spray) ȿ̴.

5.  ܷ ߻ ʴ´.

̾ ˷̳(Al2O3) 2050 ̻󿡼 ܰ ü پ Ư, ߿ ݼӰ , , ̾Ƹ 浵(Mohs 9) ݵü ȸα, ݵü ǰ, ǰ  ϰ , Ư TV LED(߱̿) ǿ ٽ ̾ ۴ ䷮ ߴϰ ִ о߷ ȸ LED TV ȭ Ϲ 忡 䰡 ȴ.

ܰ

Yellowish Transparent Liquid

Ȱ˻

(at 20)

1.09~1.12

Hydrometer

Fisher Scientific

pH ()

13.0 ~ 14.0

pH meter

Orion 520A

µ()

70~75

ݵü ǰ(45~50)

ð(min)

5~10

(Ultrasonic)

񼮳(%)

1~30

,

*

1 ̿º ÷ ǥ ̼ ߻ϴ ̿ Ͽ ppm level ع̷ Һм ȭб, м  ̿ м (SIMS :Secondary Ion Mass Spectrometry) ̿Ͽ ݵü ǰ Silicon ܷ ݼ̿ ⹰ Ÿ 2 ǿ Ͽ.

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Element

Retained Dose[atoms/cm2]

WD-240

S

J

Na

4.72e13

3.13e14

1.31e14

Mg

8.99e13

1.35e14

1.56e14

Al

6.78e12

8.14e12

1.03e13

K

2.96e15

5.82e15

3.88e15

Ca

1.72e14

4.26e14

9.37e14

Ti

7.32e12

1.95e13

5.27e13

Fe

5.79e12

1.96e13

9.92e12

Cu

2.59e13

7.73e13

8.24e13

C

3.42e15

3.04e15

2.00e16

ܷ ݼ̿° ⹰ SIMS м